Imaging of Grating Patterns Positioned on Each Side of a Wafer

Simulating aperiodic structures commonly found in semiconductor testing systems is notoriously challenging: feature sizes of the structures fall between the capabilities of rigorous Maxwell solvers and ray-based solvers. VirtualLab Fusion’s field decomposition technique addresses this by dividing the structure into regular subsections, allowing for individual calculation. Its flexible detection concept then enables light recombination at the detector, allowing for automatic calculation of radiometric quantities like irradiance.