Simulation of Basic Mirau Interferometer
How can a Mirau interferometer be set up in VirtualLab Fusion? This use case demonstrates the modeling via the nonsequential channel configuration and the simulation of the basic functionality. Typical defocus fringes from different test surface positions are evaluated.
- Learn more (PDF) pdf 06.05.22
- Sample files in VirtualLab Fusion (ZIP) zip 06.05.22
