Polarization-Dependent Binary Resonant Gratings

Polarization-dependent diffraction gratings are found helpful for certain optical metrology systems. According to the work of J. Wüster et al., we construct a grating with sub-wavelength structures following the principle of form birefringence. The grating has a super-period greater than the wavelength, and it shows clearly the polarization dependency: when illuminated with TE polarization, the zeroth order has high transmission efficiency; while for TM case, the ±1 orders have high efficiencies.