Imaging of Sub-Wavelength Gratings by Using Vector Beam Illumination
Abstract
It has been shown that the polarization of light play an important role in the interaction with micro- and nanostructures. For example, different types of vector beams have been employed in microscopy. In this example, a high-NA microscope for imaging of sub-wavelength grating is build up, and the influences from illumination with linear, radial, and azimuthal polarizations is investigated.
VirtualLab Fusion Configuration
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VirtualLab Fusion
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Grating Package
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